Semiconductor process engineers would love to develop successful process recipes without the guesswork of repeated wafer testing. Unfortunately, developing a successful process can’t be done without ...
It is becoming more and more difficult in nanometer designs to reliably print the image intended by the designer. This task is demanding enough under normal conditions; maintaining pattern fidelity ...
Virtual fabrication is used to evaluate the performance of interconnects (line and via resistance, capacitance, etc.) across pitches compatible with either EUV single exposure or SADP for three ...
SAN FRANCISCO—Manufacturing process variability has for years been demonized by tool vendors looking to sell design-for-manufacturing (DFM) solutions. Now, one of them, Mentor Graphics Corp., has a ...
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